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Semiconductor & Display Photo Patternable Materials
Semiconductor & Display Photo Patternable Materials
Content
- High-sensitivity, low-dielectric materials using silicon nanotechnology
- High-sensitivity, high-resolution photoresists utilizing PHS technology
| Type | Key Features |
| Positive | High heat resistance and high resolution through Si polymers and KrF technology |
| Negative | Free from bias and stitch defects through composition technology. |
